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![Micro Technology: Micromechanics: Light micrograph of the detector 'teeth' of a micro-resonator. This is a tiny mechanical resonating structure, made by the same silicon deposition process used in the manufacture of microcircuits. The 'teeth' seen here detect the motion of the resonator, the central buff-colored object. The dark vertical lines running above and below the resonator are the strands of silicon connecting the sensor to the resonant masses. The strands are only two microns thick, but at this scale silicon has a greater mechanical strength than steel. Micro-resonators have a variety of uses in detecting very small amplitude motions. [1989]](https://m.psecn.photoshelter.com/img-get2/I0000elJR8at6E2E/fill=/fit=180x180/I0000elJR8at6E2E.jpg)
![Micro Technology: Micromechanics: Scanning electron micrograph (SEM) of a mite (Acarimetaseiulus occidentalis) on the surface of a silicon micro-resonator 'chip'. The micro- resonator, or 'semaphore structure', is a product of micromechanics. Micro-resonators are use to make tiny vibration sensors for engineering use. The comb-like detector ends of the micro- resonators are seen here, a thin strand of silicon running from the left detector toward top left is attached to a large resonant mass. The absence of a resonant mass fixed to the right detector indicates a fault in manufacture. To give an idea of scale, the silicon strand is 2 microns thick and 2 microns wide. Reid Brennan's semaphore structure with mite. [1990]](https://m.psecn.photoshelter.com/img-get2/I0000DkBw0Qlh1EI/fill=/fit=180x180/I0000DkBw0Qlh1EI.jpg)
