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Micro Technology: Micromechanics: Light micrograph of the detector 'teeth' of a micro-resonator. This is a tiny mechanical resonating structure, made by the same silicon deposition process used in the manufacture of microcircuits. The 'teeth' seen here detect the motion of the resonator, the central buff-colored object. The dark vertical lines running above and below the resonator are the strands of silicon connecting the sensor to the resonant masses. The strands are only two microns thick, but at this scale silicon has a greater mechanical strength than steel. Micro-resonators have a variety of uses in detecting very small amplitude motions. [1989]